Inventor
FURUYA NAOKAZU
JP6 patents
⚠️ This page may combine multiple inventors who share the name “FURUYA NAOKAZU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
4 patentsUS12322578B2Jun 3, 2025
Exhaust device, processing apparatus, and exhausting method
TOKYO ELECTRON LTD0 citations60
US11315770B2Apr 26, 2022
Exhaust device for processing apparatus provided with multiple blades
TOKYO ELECTRON LTD0 citations60
US10943766B2Mar 9, 2021
Power feed member and substrate processing apparatus
TOKYO ELECTRON LTD0 citations49
US11756769B2Sep 12, 2023
Plasma processing apparatus
TOKYO ELECTRON LTD0 citations47