Inventor
ATOJI TADASHI
JP10 patents
Patents
10 patentsUS6054363AApr 25, 2000
Method of manufacturing semiconductor article
CANON KK193 citations99
US7245002B2Jul 17, 2007
Semiconductor substrate having a stepped profile
CANON KK261 citations98
US6417108B1Jul 9, 2002
Semiconductor substrate and method of manufacturing the same
CANON KK299 citations98
US6156624ADec 5, 2000
Method for production of SOI substrate by pasting and SOI substrate
CANON KK59 citations96
US5686734ANov 11, 1997
Thin film semiconductor device and photoelectric conversion device using the thin film semiconductor device
CANON KK58 citations96
US6103009AAug 15, 2000
Fabrication process for a SOI substrate
CANON KK76 citations95
US5876497AMar 2, 1999
Fabrication process and fabrication apparatus of SOI substrate
CANON KK83 citations95
US7642112B2Jan 5, 2010
Method of manufacturing bonded substrate stack
CANON KK21 citations91
US5445992AAug 29, 1995
Process for forming a silicon carbide film
CANON KK6 citations62
US8029685B2Oct 4, 2011
Liquid ejection head and its method of manufacture
CANON KK1 citations51