Inventor
WILLENBORG DAVID L
US8 patents
⚠️ This page may combine multiple inventors who share the name “WILLENBORG DAVID L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
THERMA WAVE INC
6 patentsUS5159412AOct 27, 1992
Optical measurement device with enhanced sensitivity
THERMA WAVE INC190 citations99
US5596406AJan 21, 1997
Sample characteristic analysis utilizing multi wavelength and multi angle polarization and magnitude change detection
THERMA WAVE INC203 citations98
US5412473AMay 2, 1995
Multiple angle spectroscopic analyzer utilizing interferometric and ellipsometric devices
THERMA WAVE INC241 citations98
US5042951AAug 27, 1991
High resolution ellipsometric apparatus
THERMA WAVE INC483 citations98
US4999014AMar 12, 1991
Method and apparatus for measuring thickness of thin films
THERMA WAVE INC539 citations98
US4795260AJan 3, 1989
Apparatus for locating and testing areas of interest on a workpiece
THERMA WAVE INC102 citations94