Inventor
RENTELN PETER
US7 patents
⚠️ This page may combine multiple inventors who share the name “RENTELN PETER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
5 patentsUS6620031B2Sep 16, 2003
Method for optimizing the planarizing length of a polishing pad
LAM RES CORP52 citations90
US6939207B2Sep 6, 2005
Method and apparatus for controlling CMP pad surface finish
LAM RES CORP5 citations71
US6645052B2Nov 11, 2003
Method and apparatus for controlling CMP pad surface finish
LAM RES CORP12 citations71
US6752698B1Jun 22, 2004
Method and apparatus for conditioning fixed-abrasive polishing pads
LAM RES CORP8 citations69
US6758726B2Jul 6, 2004
Partial-membrane carrier head
LAM RES CORP0 citations49