Inventor
HUNGER RUEDIGER
DE3 patents
Patents
3 patentsUS6250141B1Jun 26, 2001
Scanning device
INFINEON TECHNOLOGIES AG7 citations70
US6804851B2Oct 19, 2004
Holder for semiconductor wafers in a brush-cleaning installation
INFINEON TECHNOLOGIES AG2 citations52
US6487744B2Dec 3, 2002
Device for cleaning a wafer of abrasive agent suspension remaining after polishing with brushes and DI water
INFINEON TECHNOLOGIES AG0 citations33