Inventor

HEIDRICH KEVIN E

US2 patents

⚠️ This page may combine multiple inventors who share the name “HEIDRICH KEVIN E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NANOMETRICS INC

1 patent

US7808643B2Oct 5, 2010

Determining overlay error using an in-chip overlay target

NANOMETRICS INC9 citations79

INTEL CORP

1 patent

US6939202B2Sep 6, 2005

Substrate retainer wear detection method and apparatus

INTEL CORP10 citations64