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Inventor
GREEN ROGER L
US
3 patents
⚠️ This page may combine multiple inventors who share the name “GREEN ROGER L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CYMER INC
2 patents
US6687562B2
Feb 3, 2004
Process monitoring system for lithography lasers
CYMER INC
48 citations
91
US7203562B2
Apr 10, 2007
Process monitoring system for lithography lasers
CYMER INC
4 citations
57
(unassigned)
1 patent
US5636967A
Jun 10, 1997
Board handling apparatus
11 citations
69