Inventor
TSOU LEN Y
US9 patents
⚠️ This page may combine multiple inventors who share the name “TSOU LEN Y”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
6 patentsUS6864041B2Mar 8, 2005
Gate linewidth tailoring and critical dimension control for sub-100 nm devices using plasma etching
IBM538 citations98
US6960510B2Nov 1, 2005
Method of making sub-lithographic features
IBM21 citations92
US6884734B2Apr 26, 2005
Vapor phase etch trim structure with top etch blocking layer
IBM38 citations91
US6828187B1Dec 7, 2004
Method for uniform reactive ion etching of dual pre-doped polysilicon regions
IBM17 citations83
US6703269B2Mar 9, 2004
Method to form gate conductor structures of dual doped polysilicon
IBM13 citations83
US6509219B2Jan 21, 2003
Fabrication of notched gates by passivating partially etched gate sidewalls and then using an isotropic etch
IBM17 citations83