Inventor

KIM YU KWEON

KR2 patents

Patents

2 patents

US6027301AFeb 22, 2000

Semiconductor wafer testing apparatus with a combined wafer alignment/wafer recognition station

SAMSUNG ELECTRONICS CO LTD21 citations88

US7040336B2May 9, 2006

Gas delivery system for supplying gas to semiconductor manufacturing equipment

SAMSUNG ELECTRONICS CO LTD1 citations47