Inventor
MORALES CARMEN L
US3 patents
Patents
3 patentsUS6063531AMay 16, 2000
Focus monitor structure and method for lithography process
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US6479817B1Nov 12, 2002
Cantilever assembly and scanning tip therefor with associated optical sensor
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US6452161B1Sep 17, 2002
Scanning probe microscope having optical fiber spaced from point of hp
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