Inventor

KLOSE GOERAN

DE3 patents

Patents

3 patents

US9738530B2Aug 22, 2017

Polycrystalline silicon deposition method

WACKER CHEMIE AG0 citations47

US10562779B2Feb 18, 2020

Process for producing polycrystalline silicon

WACKER CHEMIE AG0 citations42

US9845247B2Dec 19, 2017

Process for producing polycrystalline silicon

WACKER CHEMIE AG0 citations42