Inventor
FOX ALEXANDER R
US6 patents
Patents
6 patentsUS10460930B2Oct 29, 2019
Selective growth of SiO2 on dielectric surfaces in the presence of copper
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US10763108B2Sep 1, 2020
Geometrically selective deposition of a dielectric film
LAM RES CORP9 citations83
US10662526B2May 26, 2020
Method for selective deposition using a base-catalyzed inhibitor
LAM RES CORP4 citations71
US10643889B2May 5, 2020
Pre-treatment method to improve selectivity in a selective deposition process
LAM RES CORP2 citations71
US10825679B2Nov 3, 2020
Selective growth of SIO2 on dielectric surfaces in the presence of copper
LAM RES CORP2 citations69
US10240236B2Mar 26, 2019
Clean resistant windows for ultraviolet thermal processing
LAM RES CORP0 citations40