Inventor
TENG KUO-TAI
US6 patents
Patents
6 patentsUS9966725B1May 8, 2018
Pulsed light beam spectral feature control
Cymer LLC4 citations67
US12529962B2Jan 20, 2026
Method of compensating wavelength error induced by repetition rate deviation
Cymer LLC0 citations58
US11803126B2Oct 31, 2023
Method of compensating wavelength error induced by repetition rate deviation
Cymer LLC1 citations58
US12597754B2Apr 7, 2026
Predictive control of a pulsed light beam
Cymer LLC0 citations57
US12438334B2Oct 7, 2025
Apparatus for and method of modulating a light source wavelength
Cymer LLC0 citations53
US11860036B2Jan 2, 2024
Determination of measurement error in an etalon
Cymer LLC0 citations45