Inventor

IMAI YASUYOSHI

JP2 patents

Patents

2 patents

US7416793B2Aug 26, 2008

Electrostatic chuck and manufacturing method for the same, and alumina sintered member and manufacturing method for the same

NGK INSULATORS LTD8 citations71

US7353979B2Apr 8, 2008

Method of fabricating substrate placing stage

NGK INSULATORS LTD3 citations59