Inventor
THAKUR RANDHIR
US58 patents
⚠️ This page may combine multiple inventors who share the name “THAKUR RANDHIR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MICRON TECHNOLOGY INC
27 patentsUS6414364B2Jul 2, 2002
Isolation structure and process therefor
MICRON TECHNOLOGY INC43 citations96
US6281543B1Aug 28, 2001
Double layer electrode and barrier system on hemispherical grain silicon for use with high dielectric constant materials and methods for fabricating the same
MICRON TECHNOLOGY INC47 citations96
US6265282B1Jul 24, 2001
Process for making an isolation structure
MICRON TECHNOLOGY INC74 citations96
US6207587B1Mar 27, 2001
Method for forming a dielectric
MICRON TECHNOLOGY INC78 citations96
US6069053AMay 30, 2000
Formation of conductive rugged silicon
MICRON TECHNOLOGY INC45 citations96
US5897363AApr 27, 1999
Shallow junction formation using multiple implant sources
MICRON TECHNOLOGY INC39 citations96
US6451661B1Sep 17, 2002
DRAM capacitor formulation using a double-sided electrode
MICRON TECHNOLOGY INC41 citations95
US7179703B2Feb 20, 2007
Method of forming shallow doped junctions having a variable profile gradation of dopants
MICRON TECHNOLOGY INC26 citations93
US6930015B2Aug 16, 2005
Diffusion-enhanced crystallization of amorphous materials to improve surface roughness
MICRON TECHNOLOGY INC13 citations93
US6359310B1Mar 19, 2002
Shallow doped junctions with a variable profile gradation of dopants
MICRON TECHNOLOGY INC15 citations93
US6126847AOct 3, 2000
High selectivity etching process for oxides
MICRON TECHNOLOGY INC22 citations93
US5937314AAug 10, 1999
Diffusion-enhanced crystallization of amorphous materials to improve surface roughness
MICRON TECHNOLOGY INC31 citations93
US6291364B1Sep 18, 2001
Method and apparatus for stabilizing high pressure oxidation of a semiconductor device
MICRON TECHNOLOGY INC18 citations92
US6737696B1May 18, 2004
DRAM capacitor formulation using a double-sided electrode
MICRON TECHNOLOGY INC14 citations91
US6635547B2Oct 21, 2003
DRAM capacitor formulation using a double-sided electrode
MICRON TECHNOLOGY INC21 citations91
US6423649B2Jul 23, 2002
Method and apparatus for stabilizing high pressure oxidation of a semiconductor device
MICRON TECHNOLOGY INC17 citations91
US6350648B1Feb 26, 2002
Formation of conductive rugged silicon
MICRON TECHNOLOGY INC13 citations82
US6596651B2Jul 22, 2003
Method for stabilizing high pressure oxidation of a semiconductor device
MICRON TECHNOLOGY INC11 citations81
US7238613B2Jul 3, 2007
Diffusion-enhanced crystallization of amorphous materials to improve surface roughness
MICRON TECHNOLOGY INC4 citations74
US6717211B2Apr 6, 2004
Shallow doped junctions with a variable profile gradation of dopants
MICRON TECHNOLOGY INC7 citations74
US6673689B2Jan 6, 2004
Double layer electrode and barrier system on hemispherical grain silicon for use with high dielectric constant materials and methods for fabricating the same
MICRON TECHNOLOGY INC12 citations74
US6511892B1Jan 28, 2003
Diffusion-enhanced crystallization of amorphous materials to improve surface roughness
MICRON TECHNOLOGY INC10 citations74
US6509227B1Jan 21, 2003
Formation of conductive rugged silicon
MICRON TECHNOLOGY INC8 citations74
US6399459B2Jun 4, 2002
Double layer electrode and barrier system on hemispherical grain silicon for use with high dielectric constant materials and methods for fabricating the same
MICRON TECHNOLOGY INC4 citations74
US6355182B2Mar 12, 2002
High selectivity etching process for oxides
MICRON TECHNOLOGY INC12 citations74
US6217784B1Apr 17, 2001
High selectivity etching process for oxides
MICRON TECHNOLOGY INC10 citations74
US6432841B1Aug 13, 2002
Method for forming a dielectric
MICRON TECHNOLOGY INC2 citations63
APPLIED MATERIALS INC
19 patentsUS9991134B2Jun 5, 2018
Processing systems and methods for halide scavenging
APPLIED MATERIALS INC100 citations99
US9704723B2Jul 11, 2017
Processing systems and methods for halide scavenging
APPLIED MATERIALS INC114 citations99
US9659792B2May 23, 2017
Processing systems and methods for halide scavenging
APPLIED MATERIALS INC125 citations99
US9496167B2Nov 15, 2016
Integrated bit-line airgap formation and gate stack post clean
APPLIED MATERIALS INC132 citations99
US9449850B2Sep 20, 2016
Processing systems and methods for halide scavenging
APPLIED MATERIALS INC135 citations99
US9184055B2Nov 10, 2015
Processing systems and methods for halide scavenging
APPLIED MATERIALS INC181 citations99
US9165786B1Oct 20, 2015
Integrated oxide and nitride recess for better channel contact in 3D architectures
APPLIED MATERIALS INC184 citations99
US9159606B1Oct 13, 2015
Metal air gap
APPLIED MATERIALS INC201 citations99
US9153442B2Oct 6, 2015
Processing systems and methods for halide scavenging
APPLIED MATERIALS INC220 citations99
US9093371B2Jul 28, 2015
Processing systems and methods for halide scavenging
APPLIED MATERIALS INC184 citations99
US9023732B2May 5, 2015
Processing systems and methods for halide scavenging
APPLIED MATERIALS INC187 citations99
US9773695B2Sep 26, 2017
Integrated bit-line airgap formation and gate stack post clean
APPLIED MATERIALS INC113 citations98
US9378978B2Jun 28, 2016
Integrated oxide recess and floating gate fin trimming
APPLIED MATERIALS INC132 citations98
US6927169B2Aug 9, 2005
Method and apparatus to improve thickness uniformity of surfaces for integrated device manufacturing
APPLIED MATERIALS INC23 citations93
US6803297B2Oct 12, 2004
Optimal spike anneal ambient
APPLIED MATERIALS INC49 citations92
US7262116B2Aug 28, 2007
Low temperature epitaxial growth of silicon-containing films using close proximity UV radiation
APPLIED MATERIALS INC9 citations73
US7986871B2Jul 26, 2011
Processing multilayer semiconductors with multiple heat sources
APPLIED MATERIALS INC2 citations63
US9431267B2Aug 30, 2016
Semiconductor device processing tools and methods for patterning substrates
APPLIED MATERIALS INC2 citations57
US9812328B2Nov 7, 2017
Methods for forming low resistivity interconnects
APPLIED MATERIALS INC0 citations52
RAMAMURTHY SUNDAR
1 patentSANDISK 3D LLC
1 patentOLSEN CHRISTOPHER
1 patentSINGH KAUSHAL K
1 patentShowing the top 50 of 58 patents by PatentIndex Score.