Inventor

NOGAMI KATSUAKI

JP2 patents

⚠️ This page may combine multiple inventors who share the name “NOGAMI KATSUAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI INT ELECTRIC INC

1 patent

US10163663B2Dec 25, 2018

Substrate processing apparatus, exhaust system and method of manufacturing semiconductor device

HITACHI INT ELECTRIC INC5 citations70

YAMAZAKI KEISHIN

1 patent

US8734148B2May 27, 2014

Heat treatment apparatus and method of manufacturing semiconductor device

YAMAZAKI KEISHIN1 citations42