Inventor
NEI HIDEKI
JP2 patents
Patents
2 patentsUS9069008B2Jun 30, 2015
Inspection apparatus for semiconductor devices and chuck stage for the inspection apparatus that is movable with respect to the front and back side electrodes
NIHON MICRONICS KK5 citations66
US9146256B2Sep 29, 2015
Probe assembly for inspecting power semiconductor devices and inspection apparatus using the same, the probe assembly having a probe block, a probe, and a cooling device
NIHON MICRONICS KK1 citations42