Inventor
BUDDENBERG HAROLD SEBASTIAAN
NL7 patents
Patents
7 patentsUS10216100B2Feb 26, 2019
Inspection substrate and an inspection method
ASML NETHERLANDS BV2 citations69
US11860546B2Jan 2, 2024
Fluid handling structure for lithographic apparatus
ASML NETHERLANDS BV0 citations59
US11454892B2Sep 27, 2022
Fluid handling structure for lithographic apparatus
ASML NETHERLANDS BV0 citations59
US11029607B2Jun 8, 2021
Fluid handling structure for lithographic apparatus
ASML NETHERLANDS BV0 citations59
US10725390B2Jul 28, 2020
Inspection substrate and an inspection method
ASML NETHERLANDS BV0 citations48
US10317804B2Jun 11, 2019
Substrate table, lithographic apparatus and method of operating a lithographic apparatus
ASML NETHERLANDS BV0 citations48
US10571810B2Feb 25, 2020
Substrate table, a lithographic apparatus and a method of operating a lithographic apparatus
ASML NETHERLANDS BV0 citations47