Inventor
CHEN I-TSENG
TW5 patents
Patents
5 patentsUS9793204B2Oct 17, 2017
Method of manufacturing semiconductor structure comprising plurality of through holes using metal hard mask
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US9773779B2Sep 26, 2017
Semiconductor structure with resistor layer and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US10957640B2Mar 23, 2021
Method for manufacturing a semiconductor structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US10276561B2Apr 30, 2019
Semiconductor structure with resistor layer and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10340218B2Jul 2, 2019
Method of manufacturing semiconductor structure comprising plurality of through holes using metal hard mask
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50