Inventor

ANELLA STEVEN

US7 patents

⚠️ This page may combine multiple inventors who share the name “ANELLA STEVEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

2 patents

US11473978B2Oct 18, 2022

Enhanced substrate temperature measurement apparatus, system and method

APPLIED MATERIALS INC0 citations57

US11543296B2Jan 3, 2023

Method and apparatus for calibration of substrate temperature using pyrometer

APPLIED MATERIALS INC0 citations56

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC

2 patents

US9484183B2Nov 1, 2016

Linkage conduit for vacuum chamber applications

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations49

US10032601B2Jul 24, 2018

Platen support structure

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations33

BATEMAN NICHOLAS

1 patent

US8216923B2Jul 10, 2012

Integrated shadow mask/carrier for patterned ion implantation

BATEMAN NICHOLAS6 citations69

AGFA CORP

1 patent

US5996206ADec 7, 1999

Method and apparatus for installing and aligning punches in an imaging system

AGFA CORP4 citations58

VARIAN SEMICONDUCTOR EQUIPMENT

1 patent

US9338829B2May 10, 2016

Heated platen with improved temperature uniformity

VARIAN SEMICONDUCTOR EQUIPMENT0 citations49