Inventor
EIB NICHOLAS
US8 patents
⚠️ This page may combine multiple inventors who share the name “EIB NICHOLAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LSI LOGIC CORP
6 patentsUS5893952AApr 13, 1999
Apparatus for rapid thermal processing of a wafer
LSI LOGIC CORP38 citations95
US6413881B1Jul 2, 2002
Process for forming thin gate oxide with enhanced reliability by nitridation of upper surface of gate of oxide to form barrier of nitrogen atoms in upper surface region of gate oxide, and resulting product
LSI LOGIC CORP60 citations94
US5682323AOct 28, 1997
System and method for performing optical proximity correction on macrocell libraries
LSI LOGIC CORP375 citations93
US5897381AApr 27, 1999
Method of forming a layer and semiconductor substrate
LSI LOGIC CORP30 citations92
US5756369AMay 26, 1998
Rapid thermal processing using a narrowband infrared source and feedback
LSI LOGIC CORP15 citations81
US6759337B1Jul 6, 2004
Process for etching a controllable thickness of oxide on an integrated circuit structure on a semiconductor substrate using nitrogen plasma and plasma and an rf bias applied to the substrate
LSI LOGIC CORP3 citations61