Inventor
ASAKURA HIROMI
JP8 patents
⚠️ This page may combine multiple inventors who share the name “ASAKURA HIROMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
OKITA SHOGO
3 patentsUS8673166B2Mar 18, 2014
Plasma processing apparatus and plasma processing method
OKITA SHOGO17 citations82
US8231798B2Jul 31, 2012
Plasma processing apparatus and plasma processing method
OKITA SHOGO7 citations82
US8591754B2Nov 26, 2013
Plasma processing apparatus and plasma processing method
OKITA SHOGO1 citations60