Inventor
SEONG CHOONG-KEE
KR3 patents
Patents
3 patentsUS7338352B2Mar 4, 2008
Slurry delivery system, chemical mechanical polishing apparatus and method for using the same
SAMSUNG ELECTRONICS CO LTD9 citations82
US9502427B2Nov 22, 2016
Non-volatile memory device and method of manufacturing the same
SAMSUNG ELECTRONICS CO LTD5 citations70
US7799687B2Sep 21, 2010
Slurry composition for a chemical mechanical polishing process and method of manufacturing a semiconductor device using the slurry composition
SAMSUNG ELECTRONICS CO LTD1 citations47