Inventor
CHINN JEFFREY
US15 patents
⚠️ This page may combine multiple inventors who share the name “CHINN JEFFREY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
13 patentsUS6699399B1Mar 2, 2004
Self-cleaning etch process
APPLIED MATERIALS INC500 citations98
US6136211AOct 24, 2000
Self-cleaning etch process
APPLIED MATERIALS INC160 citations98
US6541164B1Apr 1, 2003
Method for etching an anti-reflective coating
APPLIED MATERIALS INC48 citations96
US6037265AMar 14, 2000
Etchant gas and a method for etching transistor gates
APPLIED MATERIALS INC54 citations96
US6235214B1May 22, 2001
Plasma etching of silicon using fluorinated gas mixtures
APPLIED MATERIALS INC54 citations95
US6583065B1Jun 24, 2003
Sidewall polymer forming gas additives for etching processes
APPLIED MATERIALS INC105 citations94
US6518206B1Feb 11, 2003
Method for etching an anti-reflective coating
APPLIED MATERIALS INC37 citations92
US6322714B1Nov 27, 2001
Process for etching silicon-containing material on substrates
APPLIED MATERIALS INC50 citations92
US6312616B1Nov 6, 2001
Plasma etching of polysilicon using fluorinated gas mixtures
APPLIED MATERIALS INC26 citations92
US6132631AOct 17, 2000
Anisotropic silicon nitride etching for shallow trench isolation in an high density plasma system
APPLIED MATERIALS INC35 citations92
US6824813B1Nov 30, 2004
Substrate monitoring method and apparatus
APPLIED MATERIALS INC33 citations90
US5893643AApr 13, 1999
Apparatus for measuring pedestal temperature in a semiconductor wafer processing system
APPLIED MATERIALS INC37 citations89
US5851926ADec 22, 1998
Method for etching transistor gates using a hardmask
APPLIED MATERIALS INC25 citations89