Inventor
STEINER STEFANIE
DE2 patents
Patents
2 patentsUS8232188B2Jul 31, 2012
High-K metal gate electrode structures formed by separate removal of placeholder materials using a masking regime prior to gate patterning
BEYER SVEN8 citations82
US8652956B2Feb 18, 2014
High-k metal gate electrode structures formed by separate removal of placeholder materials using a masking regime prior to gate patterning
BEYER SVEN4 citations71