Inventor
SASAKI TOSHIMITSU
JP10 patents
⚠️ This page may combine multiple inventors who share the name “SASAKI TOSHIMITSU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
5 patentsUS12496677B2Dec 16, 2025
Polishing apparatus and polishing method
EBARA CORP0 citations51
US11478893B2Oct 25, 2022
Polishing method and polishing apparatus
EBARA CORP0 citations51
US11260496B2Mar 1, 2022
Polishing method and polishing apparatus
EBARA CORP0 citations51
US11833641B2Dec 5, 2023
Cleaning method for optical surface monitoring device
EBARA CORP0 citations50
US11759913B2Sep 19, 2023
Polishing method and polishing apparatus
EBARA CORP0 citations48