Inventor
NGUYEN HUY Q
US11 patents
⚠️ This page may combine multiple inventors who share the name “NGUYEN HUY Q”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
4 patentsUS10892147B2Jan 12, 2021
Method and apparatus for calibrating optical path degradation useful for decoupled plasma nitridation chambers
APPLIED MATERIALS INC1 citations71
US9831091B2Nov 28, 2017
Plasma treating a process chamber
APPLIED MATERIALS INC4 citations71
US10290504B2May 14, 2019
Plasma treating a process chamber
APPLIED MATERIALS INC1 citations61
US12159797B2Dec 3, 2024
Pyrometry error detection sensor for RTP temperature control system
APPLIED MATERIALS INC0 citations44
TALLAVARJULA SAIRAJU
2 patentsUS8101906B2Jan 24, 2012
Method and apparatus for calibrating optical path degradation useful for decoupled plasma nitridation chambers
TALLAVARJULA SAIRAJU14 citations89
US9865438B2Jan 9, 2018
Method and apparatus for calibrating optical path degradation useful for decoupled plasma nitridation chambers
TALLAVARJULA SAIRAJU2 citations69