Inventor

SCHUBERT KAI

DE2 patents

Patents

2 patents

US9312093B1Apr 12, 2016

Particle beam device comprising an electrode unit

ZEISS CARL MICROSCOPY GMBH1 citations47

US9947504B2Apr 17, 2018

Particle beam apparatus and method for operating a particle beam apparatus

ZEISS CARL MICROSCOPY GMBH0 citations35