Inventor
WONG LOKE-YUEN
SG5 patents
⚠️ This page may combine multiple inventors who share the name “WONG LOKE-YUEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
4 patentsUS10629430B2Apr 21, 2020
Variable frequency microwave (VFM) processes and applications in semiconductor thin film fabrications
APPLIED MATERIALS INC4 citations70
US9960035B2May 1, 2018
Variable frequency microwave (VFM) processes and applications in semiconductor thin film fabrications
APPLIED MATERIALS INC2 citations70
US9548200B2Jan 17, 2017
Variable frequency microwave (VFM) processes and applications in semiconductor thin film fabrications
APPLIED MATERIALS INC3 citations70
US9472392B2Oct 18, 2016
Step coverage dielectric
APPLIED MATERIALS INC3 citations66