Inventor

KANEHARA JUNICHI

NL5 patents

Patents

5 patents

US11105619B2Aug 31, 2021

Measurement apparatus

ASML NETHERLANDS BV3 citations70

US11092903B2Aug 17, 2021

Exposure apparatus

ASML NETHERLANDS BV2 citations67

US11874103B2Jan 16, 2024

Measurement apparatus

ASML NETHERLANDS BV0 citations60

US12265337B2Apr 1, 2025

Exposure apparatus

ASML NETHERLANDS BV0 citations56

US12147167B2Nov 19, 2024

Imprint apparatus with movable stages

ASML NETHERLANDS BV0 citations50