Inventor
SAKAI YUZURU
JP5 patents
⚠️ This page may combine multiple inventors who share the name “SAKAI YUZURU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
4 patentsUS11380547B2Jul 5, 2022
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations56
US12463025B2Nov 4, 2025
Plasma processing apparatus
TOKYO ELECTRON LTD0 citations47
US11756769B2Sep 12, 2023
Plasma processing apparatus
TOKYO ELECTRON LTD0 citations47
US11817321B2Nov 14, 2023
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD0 citations45