Inventor
HUNTER REGINALD
US19 patents
Patents
19 patentsUS6468816B2Oct 22, 2002
Method for sensing conditions within a substrate processing system
APPLIED MATERIALS INC84 citations99
US6244121B1Jun 12, 2001
Sensor device for non-intrusive diagnosis of a semiconductor processing system
APPLIED MATERIALS INC258 citations99
US7012684B1Mar 14, 2006
Method and apparatus to provide for automated process verification and hierarchical substrate examination
APPLIED MATERIALS INC73 citations98
US6630995B1Oct 7, 2003
Method and apparatus for embedded substrate and system status monitoring
APPLIED MATERIALS INC98 citations98
US7434485B2Oct 14, 2008
Sensor device for non-intrusive diagnosis of a semiconductor processing system
APPLIED MATERIALS INC25 citations96
US7331250B2Feb 19, 2008
Sensor device for non-intrusive diagnosis of a semiconductor processing system
APPLIED MATERIALS INC42 citations96
US6895831B2May 24, 2005
Sensor device for non-intrusive diagnosis of a semiconductor processing system
APPLIED MATERIALS INC47 citations96
US6721045B1Apr 13, 2004
Method and apparatus to provide embedded substrate process monitoring through consolidation of multiple process inspection techniques
APPLIED MATERIALS INC70 citations96
US6707545B1Mar 16, 2004
Optical signal routing method and apparatus providing multiple inspection collection points on semiconductor manufacturing systems
APPLIED MATERIALS INC62 citations96
US6677166B2Jan 13, 2004
Method for confirming alignment of a substrate support mechanism in a semiconductor processing system
APPLIED MATERIALS INC31 citations96
US6642853B2Nov 4, 2003
Movable wireless sensor device for performing diagnostics with a substrate processing system
APPLIED MATERIALS INC34 citations96
US6026896AFeb 22, 2000
Temperature control system for semiconductor processing facilities
APPLIED MATERIALS INC59 citations96
US6707544B1Mar 16, 2004
Particle detection and embedded vision system to enhance substrate yield and throughput
APPLIED MATERIALS INC58 citations95
US6813032B1Nov 2, 2004
Method and apparatus for enhanced embedded substrate inspection through process data collection and substrate imaging techniques
APPLIED MATERIALS INC54 citations92
US6697517B1Feb 24, 2004
Particle detection and embedded vision system to enhance substrate yield and throughput
APPLIED MATERIALS INC38 citations92
US6693708B1Feb 17, 2004
Method and apparatus for substrate surface inspection using spectral profiling techniques
APPLIED MATERIALS INC51 citations92
US6882416B1Apr 19, 2005
Methods for continuous embedded process monitoring and optical inspection of substrates using specular signature analysis
APPLIED MATERIALS INC51 citations87
US6878636B2Apr 12, 2005
Method for enhancing substrate processing
APPLIED MATERIALS INC13 citations83
US7969465B2Jun 28, 2011
Method and apparatus for substrate imaging
APPLIED MATERIALS INC5 citations59