Inventor
SAITO KIMIHIDE
JP3 patents
Patents
3 patentsUS6071807AJun 6, 2000
Fabrication method of semiconductor device including insulation film with decomposed organic content
SANYO ELECTRIC CO29 citations91
US6437424B1Aug 20, 2002
Non-volatile semiconductor memory device with barrier and insulating films
SANYO ELECTRIC CO27 citations88
US7497908B2Mar 3, 2009
Film coating unit and film coating method
SANYO ELECTRIC CO2 citations61