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Inventor
RUTH DOUGLAS E
US
4 patents
⚠️ This page may combine multiple inventors who share the name “RUTH DOUGLAS E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
THERMA WAVE INC
2 patents
US6563586B1
May 13, 2003
Wafer metrology apparatus and method
THERMA WAVE INC
44 citations
95
US6919958B2
Jul 19, 2005
Wafer metrology apparatus and method
THERMA WAVE INC
7 citations
70
TOKYO ELECTRON LTD
2 patents
US7042580B1
May 9, 2006
Apparatus for imaging metrology
TOKYO ELECTRON LTD
10 citations
73
US7177019B2
Feb 13, 2007
Apparatus for imaging metrology
TOKYO ELECTRON LTD
6 citations
62