Inventor
TRAN HUYEN KAREN
US3 patents
Patents
3 patentsUS7210988B2May 1, 2007
Method and apparatus for reduced wear polishing pad conditioning
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US7879255B2Feb 1, 2011
Method and composition for electrochemically polishing a conductive material on a substrate
APPLIED MATERIALS INC1 citations50
US10786885B2Sep 29, 2020
Thin plastic polishing article for CMP applications
APPLIED MATERIALS INC0 citations38