Inventor
KUWANO HIDEAKI
JP3 patents
Patents
3 patentsUS7316884B2Jan 8, 2008
5-methylene-1,3-dioxolan-4-one derivatives, process for their production, polymers of the derivatives, resist compositions, and pattern formation process
MITSUBISHI RAYON CO13 citations81
US7041838B2May 9, 2006
(Meth)acrylate esters, starting alcohols for the preparation thereof, processes for preparing both, polymers of the esters, chemically amplifiable resist compositions, and method for forming patterns
MITSUBISHI RAYON CO5 citations71
US7339014B2Mar 4, 2008
(Meth)acrylate, raw material alcohol for the (meth)acrylate, method of producing the (meth)acrylate and the alcohol, polymer produced by polymerizing the (meth)acrylate, chemically amplified resist composition, and method of the formation of a pattern
MITSUBISHI RAYON CO1 citations50