Inventor
KIM CHAE LYOUNG
KR4 patents
⚠️ This page may combine multiple inventors who share the name “KIM CHAE LYOUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
2 patentsUS10388537B2Aug 20, 2019
Cleaning apparatus, chemical mechanical polishing system including the same, cleaning method after chemical mechanical polishing, and method of manufacturing semiconductor device including the same
SAMSUNG ELECTRONICS CO LTD3 citations71
US12280466B2Apr 22, 2025
Substrate polishing apparatus, substrate polishing system including the same, and substrate polishing method using the same
SAMSUNG ELECTRONICS CO LTD0 citations59