Inventor

BRALY LINDA

US5 patents

⚠️ This page may combine multiple inventors who share the name “BRALY LINDA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

3 patents

US7303999B1Dec 4, 2007

Multi-step method for etching strain gate recesses

LAM RES CORP95 citations96

US7204934B1Apr 17, 2007

Method for planarization etch with in-situ monitoring by interferometry prior to recess etch

LAM RES CORP10 citations81

US8671878B2Mar 18, 2014

Profile and CD uniformity control by plasma oxidation treatment

LAM RES CORP2 citations61

KAMP TOM

1 patent

US8901004B2Dec 2, 2014

Plasma etch method to reduce micro-loading

KAMP TOM11 citations75

ZHONG QINGHUA

1 patent

US8298949B2Oct 30, 2012

Profile and CD uniformity control by plasma oxidation treatment

ZHONG QINGHUA3 citations60