Inventor

KÖHLER CARSTEN ANDREAS

NL3 patents

⚠️ This page may combine multiple inventors who share the name “KÖHLER CARSTEN ANDREAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

1 patent

US11474436B2Oct 18, 2022

Tuning patterning apparatus based on optical characteristic

ASML NETHERLANDS BV0 citations50

KÖHLER CARSTEN ANDREAS

1 patent

US8717540B2May 6, 2014

Calculating a laser metric within a lithographic apparatus and method thereof

KÖHLER CARSTEN ANDREAS0 citations42

ENGBLOM PETER DAVID

1 patent

US9280064B2Mar 8, 2016

Lithographic method and apparatus

ENGBLOM PETER DAVID0 citations41