Inventor
ZAUER ITAY
IL3 patents
Patents
3 patentsUS10354376B2Jul 16, 2019
Technique for measuring overlay between layers of a multilayer structure
APPLIED MATERIALS ISRAEL LTD5 citations80
US9530199B1Dec 27, 2016
Technique for measuring overlay between layers of a multilayer structure
APPLIED MATERIALS ISRAEL LTD12 citations80
US9916652B2Mar 13, 2018
Technique for measuring overlay between layers of a multilayer structure
APPLIED MATERIALS ISRAEL LTD2 citations69