Inventor
KERSSEMAKERS SANDER
NL10 patents
⚠️ This page may combine multiple inventors who share the name “KERSSEMAKERS SANDER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
7 patentsUS12007699B2Jun 11, 2024
Vessel for a radiation source
ASML NETHERLANDS BV2 citations71
US7659988B2Feb 9, 2010
Apparatus for angular-resolved spectroscopic lithography characterization and device manufacturing method
ASML NETHERLANDS BV7 citations71
US10649347B2May 12, 2020
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations57
US10139735B2Nov 27, 2018
Lithographic apparatus and method
ASML NETHERLANDS BV1 citations49
US10114299B2Oct 30, 2018
Lithographic apparatus
ASML NETHERLANDS BV0 citations46
US10409175B2Sep 10, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations38
US10088756B2Oct 2, 2018
Lithographic apparatus and method
ASML NETHERLANDS BV0 citations36
SEIJGER OLAV JOHANNES
3 patentsUS8797509B2Aug 5, 2014
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
SEIJGER OLAV JOHANNES0 citations44
US8773640B2Jul 8, 2014
Inspection method and apparatus
SEIJGER OLAV JOHANNES1 citations44
US8922755B2Dec 30, 2014
Support structure, inspection apparatus, lithographic apparatus and methods for loading and unloading substrates
SEIJGER OLAV JOHANNES0 citations34