Inventor
TANG TONY
US11 patents
⚠️ This page may combine multiple inventors who share the name “TANG TONY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MEMS DRIVE INC
6 patentsUS9426362B2Aug 23, 2016
Three-axis OIS for super-resolution imaging
MEMS DRIVE INC12 citations83
US9630836B2Apr 25, 2017
Simplified MEMS device fabrication process
MEMS DRIVE INC3 citations72
US9617142B1Apr 11, 2017
MEMS grid for manipulating structural parameters of MEMS devices
MEMS DRIVE INC3 citations72
US10199262B2Feb 5, 2019
MEMS grid for manipulating structural parameters of MEMS devices
MEMS DRIVE INC0 citations51
US10160641B2Dec 25, 2018
Simplified MEMS device fabrication process
MEMS DRIVE INC0 citations51
US10043704B2Aug 7, 2018
MEMS grid for manipulating structural parameters of MEMS devices
MEMS DRIVE INC0 citations51