Inventor
SCHAFF STEFAN
DE3 patents
Patents
3 patentsUS9671548B2Jun 6, 2017
Optical waveguide for guiding illumination light
ZEISS CARL SMT GMBH8 citations81
US10809636B2Oct 20, 2020
Optical arrangement, in particular lithography system
ZEISS CARL SMT GMBH2 citations67
US10254466B2Apr 9, 2019
Optical waveguide for guiding illumination light
ZEISS CARL SMT GMBH0 citations49