Inventor
CHIEN CHENG-CHUNG
TW6 patents
⚠️ This page may combine multiple inventors who share the name “CHIEN CHENG-CHUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
5 patentsUS10189143B2Jan 29, 2019
Polishing pad, method for manufacturing polishing pad, and polishing method
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations80
US10978329B2Apr 13, 2021
Wafer pod handling method
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations72
US11597053B2Mar 7, 2023
Polishing pad, method for manufacturing polishing pad, and polishing method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US10510572B2Dec 17, 2019
Semiconductor processing station
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10332769B2Jun 25, 2019
Semiconductor processing station, semiconductor process and method of operating semiconductor processing station
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51