Inventor
EBERT MARTIN
US29 patents
⚠️ This page may combine multiple inventors who share the name “EBERT MARTIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
10 patentsUS10379445B2Aug 13, 2019
Metrology method, target and substrate
ASML NETHERLANDS BV13 citations84
US10133188B2Nov 20, 2018
Metrology method, target and substrate
ASML NETHERLANDS BV10 citations84
US10338401B2Jul 2, 2019
Illumination system, inspection apparatus including such an illumination system, inspection method and manufacturing method
ASML NETHERLANDS BV2 citations73
US10254658B2Apr 9, 2019
Metrology method, target and substrate
ASML NETHERLANDS BV4 citations72
US11429029B2Aug 30, 2022
Method and apparatus for illumination adjustment
ASML NETHERLANDS BV0 citations62
US12204826B2Jan 21, 2025
Method and apparatus for inspection and metrology
ASML NETHERLANDS BV0 citations59
US11580274B2Feb 14, 2023
Method and apparatus for inspection and metrology
ASML NETHERLANDS BV1 citations59
US12562334B2Feb 24, 2026
Multi-beam charged particle column
ASML NETHERLANDS BV0 citations55
US10620550B2Apr 14, 2020
Metrology method and apparatus
ASML NETHERLANDS BV0 citations52
US9753296B2Sep 5, 2017
Illumination system, inspection apparatus including such an illumination system, inspection method and manufacturing method
ASML NETHERLANDS BV1 citations52
THERMA WAVE INC
8 patentsUS6952258B2Oct 4, 2005
Wafer chuck with integrated reference sample
THERMA WAVE INC60 citations94
US6952261B2Oct 4, 2005
System for performing ellipsometry using an auxiliary pump beam to reduce effective measurement spot size
THERMA WAVE INC20 citations92
US6798512B2Sep 28, 2004
Multiple beam ellipsometer
THERMA WAVE INC12 citations82
US6747746B2Jun 8, 2004
System and method for finding the center of rotation of an R-theta stage
THERMA WAVE INC18 citations79
US6624403B2Sep 23, 2003
Autofocus system
THERMA WAVE INC9 citations73
US6757059B2Jun 29, 2004
Wafer chuck with integrated reference sample
THERMA WAVE INC12 citations72
US7342661B2Mar 11, 2008
Method for noise improvement in ellipsometers
THERMA WAVE INC3 citations62
US7030984B2Apr 18, 2006
Fast wafer positioning method for optical metrology
THERMA WAVE INC2 citations58