Inventor
TRABER THOMAS
US4 patents
Patents
4 patentsUS6952258B2Oct 4, 2005
Wafer chuck with integrated reference sample
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Rotational stage with vertical axis adjustment
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US6757059B2Jun 29, 2004
Wafer chuck with integrated reference sample
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US6917420B2Jul 12, 2005
Rotational stage with vertical axis adjustment
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