Inventor
FUJISHITA NAOMITSU
JP3 patents
Patents
3 patentsUS5387843AFeb 7, 1995
Ion source having plasma chamber, an electron source, and a plasma power supply
MITSUBISHI ELECTRIC CORP35 citations90
US5132545AJul 21, 1992
Ion implantation apparatus
MITSUBISHI ELECTRIC CORP41 citations89
US5329129AJul 12, 1994
Electron shower apparatus including filament current control
MITSUBISHI ELECTRIC CORP10 citations72