Inventor
ASDIGHA MEHRAN
US6 patents
⚠️ This page may combine multiple inventors who share the name “ASDIGHA MEHRAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AXCELIS TECH INC
4 patentsUS6987272B2Jan 17, 2006
Work piece transfer system for an ion beam implanter
AXCELIS TECH INC22 citations90
US7112808B2Sep 26, 2006
Wafer 2D scan mechanism
AXCELIS TECH INC7 citations72
US7119343B2Oct 10, 2006
Mechanical oscillator for wafer scan with spot beam
AXCELIS TECH INC10 citations68
US7267520B2Sep 11, 2007
Wafer scanning system with reciprocating rotary motion utilizing springs and counterweights
AXCELIS TECH INC5 citations62