Inventor
MOSCHINI LAWRENCE R
US4 patents
⚠️ This page may combine multiple inventors who share the name “MOSCHINI LAWRENCE R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BROOKS AUTOMATION INC
3 patentsUS6054688AApr 25, 2000
Hybrid heater with ceramic foil serrated plate and gas assist
BROOKS AUTOMATION INC29 citations89
US5911896AJun 15, 1999
Substrate heating apparatus with glass-ceramic panels and thin film ribbon heater element
BROOKS AUTOMATION INC37 citations89
US6046435AApr 4, 2000
Method of heating a substrate with multiple selectively deactuated heaters
BROOKS AUTOMATION INC9 citations70