Inventor

VALENZA MARIO

US2 patents

Patents

2 patents

US5911896AJun 15, 1999

Substrate heating apparatus with glass-ceramic panels and thin film ribbon heater element

BROOKS AUTOMATION INC37 citations89

US6046435AApr 4, 2000

Method of heating a substrate with multiple selectively deactuated heaters

BROOKS AUTOMATION INC9 citations70